Assignee
MICHELSSON DETLEF
DE4 patents
Top patents by PatentIndex Score
US8200004B2Jun 12, 2012
Method for inspecting a surface of a wafer with regions of different detection sensitivity
MICHELSSON DETLEF9 citations82
US8705837B2Apr 22, 2014
Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method
MICHELSSON DETLEF4 citations65
US8264534B2Sep 11, 2012
Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera
MICHELSSON DETLEF3 citations60
US8200003B2Jun 12, 2012
Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects
MICHELSSON DETLEF5 citations60