Assignee
MICRION CORP
US14 patents
Top patents by PatentIndex Score
US6039000AMar 21, 2000
Focused particle beam systems and methods using a tilt column
MICRION CORP106 citations97
US5034612AJul 23, 1991
Ion source method and apparatus
MICRION CORP72 citations96
US6042738AMar 28, 2000
Pattern film repair using a focused particle beam system
MICRION CORP142 citations95
US6354438B1Mar 12, 2002
Focused ion beam apparatus for forming thin-film magnetic recording heads
MICRION CORP68 citations93
US5916424AJun 29, 1999
Thin film magnetic recording heads and systems and methods for manufacturing the same
MICRION CORP62 citations93
US5851413ADec 22, 1998
Gas delivery systems for particle beam processing
MICRION CORP167 citations93
US4874947AOct 17, 1989
Focused ion beam imaging and process control
MICRION CORP105 citations93
US5155368AOct 13, 1992
Ion beam blanking apparatus and method
MICRION CORP37 citations92
US5103102AApr 7, 1992
Localized vacuum apparatus and method
MICRION CORP79 citations92
US4976843ADec 11, 1990
Particle beam shielding
MICRION CORP27 citations90
US4943732AJul 24, 1990
Method and apparatus for defect detection and location
MICRION CORP23 citations86
US6004437ADec 21, 1999
Thin-film magnetic recording head manufacturing method
MICRION CORP13 citations80
US6332962B1Dec 25, 2001
Thin-film magnetic recording head manufacture using selective imaging
MICRION CORP11 citations70
US6113056ASep 5, 2000
Workpiece vibration damper
MICRION CORP15 citations60