Assignee
MICROBEAM INC
US5 patents
Top patents by PatentIndex Score
US5035787AJul 30, 1991
Method for repairing semiconductor masks and reticles
MICROBEAM INC74 citations95
US4818872AApr 4, 1989
Integrated charge neutralization and imaging system
MICROBEAM INC69 citations94
US5165954ANov 24, 1992
Method for repairing semiconductor masks & reticles
MICROBEAM INC31 citations92
US4929839AMay 29, 1990
Focused ion beam column
MICROBEAM INC41 citations92
US4789787ADec 6, 1988
Wien filter design
MICROBEAM INC46 citations92