Assignee
MICROGAN GMBH
DE3 patents
Top patents by PatentIndex Score
US7352008B2Apr 1, 2008
Heterostructure with rear-face donor doping
MICROGAN GMBH9 citations77
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Micromechanical actuators comprising semiconductors on a group III nitride basis
MICROGAN GMBH3 citations57
US7394112B2Jul 1, 2008
Heterostructure with rear-face donor doping
MICROGAN GMBH2 citations56