Assignee
MICRONIC LASER SYSTEMS AB
SE·94 granted patents·16 pending applications·3,570 citations·filing 1993–2010
Top patents by PatentIndex Score
110 records- 0199US7710634B2Pattern generatorMICRONIC LASER SYSTEMS AB·Filed 2009·Granted May 4, 2010·28 cites·8 claims
- 0299US6747783B1Pattern generatorMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Jun 8, 2004·475 cites·49 claims
- 0399US6687041B1Pattern generator using EUVMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Feb 3, 2004·477 cites·10 claims
- 0499US6285488B1Pattern generator for avoiding stitching errorsMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Sep 4, 2001·294 cites·21 claims
- 0598US6618185B2Defective pixel compensation methodMICRONIC LASER SYSTEMS AB·Filed 2001·Granted Sep 9, 2003·141 cites·64 claims
- 0697US7184192B2Pattern generator diffractive mirror methods and systemsMICRONIC LASER SYSTEMS AB·Filed 2006·Granted Feb 27, 2007·32 cites·20 claims
- 0797US6504644B1Modulator design for pattern generatorMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Jan 7, 2003·129 cites·46 claims
- 0896US7158280B2Methods and systems for improved boundary contrastMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Jan 2, 2007·30 cites·15 claims
- 0996US6883158B1Method for error reduction in lithographyMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Apr 19, 2005·130 cites·38 claims
- 1095US7618751B2RET for optical maskless lithographyMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Nov 17, 2009·27 cites·19 claims
- 1195US7542129B2Patterning apparatuses and methods for the sameMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Jun 2, 2009·24 cites·37 claims
- 1295US6891655B2High energy, low energy density, radiation-resistant optics used with micro-electromechanical devicesMICRONIC LASER SYSTEMS AB·Filed 2003·Granted May 10, 2005·175 cites·46 claims
- 1395US6717097B1Data path for high performance pattern generatorMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Apr 6, 2004·69 cites·24 claims
- 1495US6428940B1Method for pattern generation with improved image qualityMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Aug 6, 2002·89 cites·14 claims
- 1594US6605816B2Reticle and direct lithography writing strategyMICRONIC LASER SYSTEMS AB·Filed 2001·Granted Aug 12, 2003·37 cites·22 claims
- 1693US7444616B2Method for error reduction in lithographyMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Oct 28, 2008·56 cites·9 claims
- 1793US7369217B2Method and device for immersion lithographyMICRONIC LASER SYSTEMS AB·Filed 2003·Granted May 6, 2008·71 cites·31 claims
- 1893US7302111B2Graphics engine for high precision lithographyMICRONIC LASER SYSTEMS AB·Filed 2001·Granted Nov 27, 2007·52 cites·23 claims
- 1992US7650588B2Methods and systems for pattern generation based on multiple forms of design dataMICRONIC LASER SYSTEMS AB·Filed 2006·Granted Jan 19, 2010·22 cites·6 claims
- 2092US7061226B2Method to detect a defective elementMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Jun 13, 2006·53 cites·47 claims
- 2192US6833854B1Method for high precision printing of patternsMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Dec 21, 2004·46 cites·42 claims
- 2291US6813062B2Defective pixel compensation methodMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Nov 2, 2004·42 cites·9 claims
- 2391US6624880B2Method and apparatus for microlithographyMICRONIC LASER SYSTEMS AB·Filed 2001·Granted Sep 23, 2003·54 cites·68 claims
- 2490US7365901B2Pattern generatorMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Apr 29, 2008·6 cites·7 claims
- 2590US7323291B2Dual layer workpiece masking and manufacturing processMICRONIC LASER SYSTEMS AB·Filed 2006·Granted Jan 29, 2008·8 cites·32 claims
- 2690US7009753B2Pattern generatorMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Mar 7, 2006·20 cites·23 claims
- 2790US6373619B1Pattern generator with improved address resolutionMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Apr 16, 2002·62 cites·13 claims
- 2889US7930653B2Triangulating design data and encoding design intent for microlithographic printingMICRONIC LASER SYSTEMS AB·Filed 2007·Granted Apr 19, 2011·15 cites·35 claims
- 2989US7405414B2Method and apparatus for patterning a workpieceMICRONIC LASER SYSTEMS AB·Filed 2002·Granted Jul 29, 2008·29 cites·29 claims
- 3089US6399261B1Pattern generator with improved precisionMICRONIC LASER SYSTEMS AB·Filed 1999·Granted Jun 4, 2002·58 cites·20 claims
- 3188US7842926B2Method and device for correcting SLM stamp image imperfectionsMICRONIC LASER SYSTEMS AB·Filed 2008·Granted Nov 30, 2010·11 cites·27 claims
- 3288US7150949B2Further method to pattern a substrateMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Dec 19, 2006·43 cites·21 claims
- 3388US6816302B2Pattern generatorMICRONIC LASER SYSTEMS AB·Filed 2001·Granted Nov 9, 2004·54 cites·39 claims
- 3488US6645677B1Dual layer reticle blank and manufacturing processMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Nov 11, 2003·21 cites·72 claims
- 3588US5495279AMethod and apparatus for exposure of substratesMICRONIC LASER SYSTEMS AB·Filed 1993·Granted Feb 27, 1996·65 cites·36 claims
- 3687US6987599B2Pattern generator mirror configurationsMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Jan 17, 2006·17 cites·30 claims
- 3786US7328425B2Method and device for correcting SLM stamp image imperfectionsMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Feb 5, 2008·27 cites·32 claims
- 3886US7106490B2Methods and systems for improved boundary contrastMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Sep 12, 2006·21 cites·25 claims
- 3986US6819490B2Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpieceMICRONIC LASER SYSTEMS AB·Filed 2002·Granted Nov 16, 2004·43 cites·26 claims
- 4085US7590966B2Data path for high performance pattern generatorMICRONIC LASER SYSTEMS AB·Filed 2004·Granted Sep 15, 2009·23 cites·10 claims
- 4184US7369962B2Method and device for data integrity checkingMICRONIC LASER SYSTEMS AB·Filed 2005·Granted May 6, 2008·8 cites·19 claims
- 4284US6965119B2Method and apparatus of calibrating multi-position SLM elementsMICRONIC LASER SYSTEMS AB·Filed 2002·Granted Nov 15, 2005·30 cites·42 claims
- 4384US6813058B1Method and apparatus for personalization of semiconductorMICRONIC LASER SYSTEMS AB·Filed 2000·Granted Nov 2, 2004·25 cites·7 claims
- 4483US7588870B2Dual layer workpiece masking and manufacturing processMICRONIC LASER SYSTEMS AB·Filed 2008·Granted Sep 15, 2009·4 cites·10 claims
- 4583US7034986B2Pattern generator mirror configurationsMICRONIC LASER SYSTEMS AB·Filed 2005·Granted Apr 25, 2006·2 cites·9 claims
- 4681US7646919B2Graphics engine for high precision lithographyMICRONIC LASER SYSTEMS AB·Filed 2007·Granted Jan 12, 2010·9 cites·13 claims
- 4781US7567375B2Hidden hinge MEMS deviceMICRONIC LASER SYSTEMS AB·Filed 2008·Granted Jul 28, 2009·12 cites·12 claims
- 4881US7446857B2Image forming method and apparatusMICRONIC LASER SYSTEMS AB·Filed 2007·Granted Nov 4, 2008·4 cites·20 claims
- 4980US7934172B2SLM lithography: printing to below K1=.30 without previous OPC processingMICRONIC LASER SYSTEMS AB·Filed 2007·Granted Apr 26, 2011·6 cites·12 claims
- 5079US6948254B2Method for calibration of a metrology stageMICRONIC LASER SYSTEMS AB·Filed 2003·Granted Sep 27, 2005·18 cites·15 claims
Showing the top 50 of 110 patent records by PatentIndex Score.
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