Assignee
MICRONIX CORP
US10 patents
Top patents by PatentIndex Score
US4704033ANov 3, 1987
Multiple wavelength linear zone plate alignment apparatus and method
MICRONIX CORP86 citations95
US4723086AFeb 2, 1988
Coarse and fine motion positioning mechanism
MICRONIX CORP93 citations94
US4668336AMay 26, 1987
Process for making a mask used in x-ray photolithography
MICRONIX CORP25 citations90
US4680243AJul 14, 1987
Method for producing a mask for use in X-ray photolithography and resulting structure
MICRONIX CORP21 citations81
US4648106AMar 3, 1987
Gas control for X-ray lithographic system
MICRONIX CORP16 citations74
US4696878ASep 29, 1987
Additive process for manufacturing a mask for use in X-ray photolithography and the resulting mask
MICRONIX CORP12 citations71
US4671850AJun 9, 1987
Mask using polyimide to support a patterned x-ray opaque layer
MICRONIX CORP11 citations71
US4608268AAug 26, 1986
Process for making a mask used in x-ray photolithography
MICRONIX CORP17 citations71
US4708919ANov 24, 1987
Process for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structure
MICRONIX CORP16 citations65
US4698834AOct 6, 1987
X-ray mask membrane deflection compensator and method
MICRONIX CORP3 citations59