Assignee
MICRONIX CORP
US·10 granted patents·300 citations·filing 1984–1986
Top patents by PatentIndex Score
10 records- 0194US4704033AMultiple wavelength linear zone plate alignment apparatus and methodMICRONIX CORP·Filed 1986·Granted Nov 3, 1987·86 cites·17 claims
- 0287US4723086ACoarse and fine motion positioning mechanismMICRONIX CORP·Filed 1986·Granted Feb 2, 1988·93 cites·10 claims
- 0373US4668336AProcess for making a mask used in x-ray photolithographyMICRONIX CORP·Filed 1986·Granted May 26, 1987·25 cites·7 claims
- 0471US4680243AMethod for producing a mask for use in X-ray photolithography and resulting structureMICRONIX CORP·Filed 1985·Granted Jul 14, 1987·21 cites·61 claims
- 0563US4648106AGas control for X-ray lithographic systemMICRONIX CORP·Filed 1984·Granted Mar 3, 1987·16 cites·11 claims
- 0663US4608268AProcess for making a mask used in x-ray photolithographyMICRONIX CORP·Filed 1985·Granted Aug 26, 1986·17 cites·4 claims
- 0756US4708919AProcess for manufacturing a mask for use in X-ray photolithography using a monolithic support and resulting structureMICRONIX CORP·Filed 1985·Granted Nov 24, 1987·16 cites·21 claims
- 0852US4671850AMask using polyimide to support a patterned x-ray opaque layerMICRONIX CORP·Filed 1985·Granted Jun 9, 1987·11 cites·10 claims
- 0946US4696878AAdditive process for manufacturing a mask for use in X-ray photolithography and the resulting maskMICRONIX CORP·Filed 1985·Granted Sep 29, 1987·12 cites·3 claims
- 1031US4698834AX-ray mask membrane deflection compensator and methodMICRONIX CORP·Filed 1986·Granted Oct 6, 1987·3 cites·19 claims
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