Assignee
MICRONIX PARTNERS
US·7 granted patents·421 citations·filing 1983–1983
Top patents by PatentIndex Score
7 records- 0197US4516253ALithography systemMICRONIX PARTNERS·Filed 1983·Granted May 7, 1985·129 cites·25 claims
- 0296US4514858ALithography systemMICRONIX PARTNERS·Filed 1983·Granted Apr 30, 1985·119 cites·4 claims
- 0392US4525852AAlignment apparatusMICRONIX PARTNERS·Filed 1983·Granted Jun 25, 1985·64 cites·20 claims
- 0487US4549843AMask loading apparatus, method and cassetteMICRONIX PARTNERS·Filed 1983·Granted Oct 29, 1985·58 cites·17 claims
- 0582US4521903AHigh power x-ray source with improved anode coolingMICRONIX PARTNERS·Filed 1983·Granted Jun 4, 1985·22 cites·19 claims
- 0674US4544311AMask alignment apparatusMICRONIX PARTNERS·Filed 1983·Granted Oct 1, 1985·24 cites·20 claims
- 0722US4540240AOptical objective adjusting apparatusMICRONIX PARTNERS·Filed 1983·Granted Sep 10, 1985·5 cites·14 claims
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