Assignee
MICROSI INC
US9 patents
Top patents by PatentIndex Score
US5310619AMay 10, 1994
Resist compositions comprising a phenolic resin, an acid forming onium salt and a tert-butyl ester or tert-butyl carbonate which is acid-cleavable
MICROSI INC177 citations99
US5196295AMar 23, 1993
Spin castable mixtures useful for making deep-UV contrast enhancement layers
MICROSI INC70 citations96
US5108874AApr 28, 1992
Composite useful in photolithography
MICROSI INC83 citations96
US5106723AApr 21, 1992
Contrast enhancement layer compositions, alkylnitrones, and use
MICROSI INC75 citations95
US5002993AMar 26, 1991
Contrast enhancement layer compositions, alkylnitrones, and use
MICROSI INC70 citations95
US5362607ANov 8, 1994
Method for making a patterned resist substrate composite
MICROSI INC36 citations92
US4990665AFeb 5, 1991
Diarylnitrones
MICROSI INC26 citations92
US4931380AJun 5, 1990
Pre-exposure method for increased sensitivity in high contrast resist development of positive working diazo ketone photoresist
MICROSI INC29 citations90
US4968757ANov 6, 1990
Soluble silicone-imide copolymers
MICROSI INC14 citations74