Assignee
MILAEBO CO LTD
KR·21 granted patents·1 pending application·53 citations·filing 2006–2024
Top patents by PatentIndex Score
22 records- 0197US11872515B2Apparatus for trapping of reaction by-product capable of expanding the area for collection by inducing gas flowMILAEBO CO LTD·Filed 2022·Granted Jan 16, 2024·5 cites·13 claims
- 0295US11623175B1Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting towerMILAEBO CO LTD·Filed 2022·Granted Apr 11, 2023·5 cites·17 claims
- 0394US11872516B2Apparatus for trapping of reaction by-product with extended available collection areaMILAEBO CO LTD·Filed 2022·Granted Jan 16, 2024·3 cites·9 claims
- 0494US11555243B2Apparatus for trapping reaction by-product produced during organic film deposition processMILAEBO CO LTD·Filed 2021·Granted Jan 17, 2023·3 cites·13 claims
- 0590US11173439B2Flow path switching type collecting apparatus of by-product for semiconductor manufacturing processMILAEBO CO LTD·Filed 2019·Granted Nov 16, 2021·7 cites·8 claims
- 0690US11117086B2Apparatus for collecting by-product of semiconductor manufacturing processMILAEBO CO LTD·Filed 2019·Granted Sep 14, 2021·7 cites·10 claims
- 0786US11054174B2Semiconductor process by-product collecting deviceMILAEBO CO LTD·Filed 2019·Granted Jul 6, 2021·6 cites·20 claims
- 0883US7988755B2Byproduct collecting apparatus of semiconductor apparatusMILAEBO CO LTD·Filed 2007·Granted Aug 2, 2011·8 cites·30 claims
- 0980US10801107B2Apparatus for collecting by-product in semiconductor processMILAEBO CO LTD·Filed 2018·Granted Oct 13, 2020·3 cites·7 claims
- 1075US10987619B2Apparatus for collecting by-product in semiconductor manufacturing processMILAEBO CO LTD·Filed 2019·Granted Apr 27, 2021·2 cites·12 claims
- 1171US7892320B2Automatically replaceable apparatus for collecting byproducts and the controlling method thereof in equipment producing semiconductorMILAEBO CO LTD·Filed 2006·Granted Feb 22, 2011·4 cites·15 claims
- 1258US12104247B2Apparatus for trapping multiple reaction by-products for semiconductor processMILAEBO CO LTD·Filed 2021·Granted Oct 1, 2024·0 cites·14 claims
- 1358US2024425980A1Apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in the high temperature region and oxidation reaction in the low temperature regionMILAEBO CO LTD·Filed 2023·Application pending·0 cites
- 1457US12451368B2Process stop loss reduction system through rapid replacement of apparatus for trapping of reaction by-product for semiconductor processMILAEBO CO LTD·Filed 2023·Granted Oct 21, 2025·0 cites·6 claims
- 1557US12195849B2Apparatus for trapping multiple reaction by-products for semiconductor processMILAEBO CO LTD·Filed 2021·Granted Jan 14, 2025·0 cites·12 claims
- 1656US12139789B2Process stop loss reduction system through rapid replacement of apparatus for trapping of reaction by-product for semiconductor processMILAEBO CO LTD·Filed 2023·Granted Nov 12, 2024·0 cites·8 claims
- 1755US12305626B2Reactive by-products collection systemMILAEBO CO LTD·Filed 2024·Granted May 20, 2025·0 cites·8 claims
- 1853US12438010B2Apparatus for collecting by-product for semiconductor manufacturing process with improved collection space efficiencyMILAEBO CO LTD·Filed 2023·Granted Oct 7, 2025·0 cites·9 claims
- 1952US11562943B2Apparatus for collecting by-product in semiconductor manufacturing processMILAEBO CO LTD·Filed 2019·Granted Jan 24, 2023·0 cites·12 claims
- 2050US12030007B2Apparatus for trapping reaction by-product created by etching processMILAEBO CO LTD·Filed 2021·Granted Jul 9, 2024·0 cites·16 claims
- 2144US11462421B2Apparatus for collecting by-product of semiconductor manufacturing processMILAEBO CO LTD·Filed 2019·Granted Oct 4, 2022·0 cites·18 claims
- 2243US11462422B2Apparatus having cooling line for collecting by-product in semiconductor manufacturing processMILAEBO CO LTD·Filed 2019·Granted Oct 4, 2022·0 cites·6 claims
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