Assignee

MIMURA TAKEYOSHI

JP·2 granted patents·7 citations·filing 2009–2009

Technology mixG03F2

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2 records

0179US8278022B2Positive resist composition and method of forming resist patternMIMURA TAKEYOSHI·Filed 2009·Granted Oct 2, 2012·7 cites·5 claims
0243US8574809B2Positive resist composition and method of forming resist patternMIMURA TAKEYOSHI·Filed 2009·Granted Nov 5, 2013·0 cites·12 claims

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