Assignee
MINODA KEN
JP4 patents
Top patents by PatentIndex Score
US8842294B2Sep 23, 2014
Position detection apparatus, imprint apparatus, and position detection method
MINODA KEN25 citations91
US8672661B2Mar 18, 2014
Imprint apparatus and article manufacturing method
MINODA KEN7 citations82
US8854605B2Oct 7, 2014
Illumination optical system, exposure apparatus, and device fabrication method
MINODA KEN4 citations71
US8305560B2Nov 6, 2012
Exposure apparatus, device manufacturing method, and aperture stop manufacturing method
MINODA KEN2 citations60