Assignee

MIRACOM INC

KR·1 granted patent·12 citations·filing 2002–2002

Technology mixG05B1 G06F1 H04Q1

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0159US6721618B2System and method for automatically generating semiconductor equipment communication standard (SECS) message source in SECS communicationMIRACOM INC·Filed 2002·Granted Apr 13, 2004·12 cites·14 claims

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