Assignee
MIRADIA INC
US75 patents
Top patents by PatentIndex Score
US7477440B1Jan 13, 2009
Reflective spatial light modulator having dual layer electrodes and method of fabricating same
MIRADIA INC70 citations98
US7184195B2Feb 27, 2007
Method and structure reducing parasitic influences of deflection devices in an integrated spatial light modulator
MIRADIA INC110 citations98
US7034984B2Apr 25, 2006
Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
MIRADIA INC68 citations98
US6992810B2Jan 31, 2006
High fill ratio reflective spatial light modulator with hidden hinge
MIRADIA INC87 citations98
US7068417B2Jun 27, 2006
Method and apparatus for a reflective spatial light modulator with a flexible pedestal
MIRADIA INC55 citations96
US7948000B2May 24, 2011
Method and system for hermetically sealing packages for optics
MIRADIA INC14 citations93
US7382513B2Jun 3, 2008
Spatial light modulator with multi-layer landing structures
MIRADIA INC16 citations93
US7303645B2Dec 4, 2007
Method and system for hermetically sealing packages for optics
MIRADIA INC12 citations93
US7245416B2Jul 17, 2007
Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge
MIRADIA INC13 citations93
US7022245B2Apr 4, 2006
Fabrication of a reflective spatial light modulator
MIRADIA INC23 citations93
US7952786B2May 31, 2011
Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
MIRADIA INC14 citations92
US7471439B2Dec 30, 2008
Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant
MIRADIA INC19 citations92
US7463404B2Dec 9, 2008
Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
MIRADIA INC20 citations92
US7430359B2Sep 30, 2008
Micromechanical system containing a microfluidic lubricant channel
MIRADIA INC20 citations92
US7372615B2May 13, 2008
Method of operating a micromechanical device that contains anti-stiction gas-phase lubricant
MIRADIA INC19 citations92
US7118234B2Oct 10, 2006
Reflective spatial light modulator
MIRADIA INC15 citations92
US7616370B2Nov 10, 2009
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
MIRADIA INC25 citations91
US7763489B2Jul 27, 2010
Method of forming a micromechanical system containing a microfluidic lubricant channel
MIRADIA INC25 citations89
US7042619B1May 9, 2006
Mirror structure with single crystal silicon cross-member
MIRADIA INC35 citations89
US8361331B2Jan 29, 2013
MEMS mirror system for laser printing applications
MIRADIA INC6 citations84
US7764535B2Jul 27, 2010
Low power, small size SRAM architecture
MIRADIA INC14 citations84
US7671461B2Mar 2, 2010
Method and system for hermetically sealing packages for optics
MIRADIA INC8 citations84
US7443568B2Oct 28, 2008
Method and system for resonant operation of a reflective spatial light modulator
MIRADIA INC11 citations84
US7265027B2Sep 4, 2007
Bond method and structure using selective application of spin on glass
MIRADIA INC11 citations84
US7172921B2Feb 6, 2007
Method and structure for forming an integrated spatial light modulator
MIRADIA INC10 citations84
US7142349B2Nov 28, 2006
Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
MIRADIA INC11 citations84
US7141870B2Nov 28, 2006
Apparatus for micro-electro mechanical system package
MIRADIA INC16 citations84
US7092140B2Aug 15, 2006
Architecture of a reflective spatial light modulator
MIRADIA INC18 citations84
US7064045B2Jun 20, 2006
Laser based method and device for forming spacer structures for packaging optical reflection devices
MIRADIA INC16 citations84
US7026695B2Apr 11, 2006
Method and apparatus to reduce parasitic forces in electro-mechanical systems
MIRADIA INC18 citations84
US7723812B2May 25, 2010
Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems
MIRADIA INC18 citations83
US7580174B2Aug 25, 2009
Anti-stiction gas-phase lubricant for micromechanical systems
MIRADIA INC16 citations83
US7723144B2May 25, 2010
Method and system for flip chip packaging of micro-mirror devices
MIRADIA INC7 citations74
US7349140B2Mar 25, 2008
Triple alignment substrate method and structure for packaging devices
MIRADIA INC6 citations74
US7344956B2Mar 18, 2008
Method and device for wafer scale packaging of optical devices using a scribe and break process
MIRADIA INC6 citations74
US7233428B2Jun 19, 2007
Method and apparatus for a reflective spatial light modulator with a flexible pedestal
MIRADIA INC8 citations74
US7190508B2Mar 13, 2007
Method and structure of patterning landing pad structures for spatial light modulators
MIRADIA INC7 citations74
US7109066B2Sep 19, 2006
Method and device for forming spacer structures for packaging optical reflection devices
MIRADIA INC10 citations74
US7863697B2Jan 4, 2011
Method and apparatus for MEMS oscillator
MIRADIA INC6 citations73
US7206110B2Apr 17, 2007
Memory cell dual protection
MIRADIA INC7 citations73
US8022520B2Sep 20, 2011
System for hermetically sealing packages for optics
MIRADIA INC3 citations63
US7911678B2Mar 22, 2011
Reflective spatial light modulator having dual layer electrodes and method of fabricating same
MIRADIA INC2 citations63
US7898561B2Mar 1, 2011
MEMS mirror system for laser printing applications
MIRADIA INC2 citations63
US7825519B2Nov 2, 2010
Method and device for wafer scale packaging of optical devices using a scribe and break process
MIRADIA INC2 citations63
US7542195B2Jun 2, 2009
Triple alignment substrate method and structure for packaging devices
MIRADIA INC2 citations63
US7505195B2Mar 17, 2009
Reflective spatial light modulator with high stiffness torsion spring hinge
MIRADIA INC2 citations63
US7502158B2Mar 10, 2009
Method and structure for high fill factor spatial light modulator with integrated spacer layer
MIRADIA INC4 citations63
US7473616B2Jan 6, 2009
Method and system for wafer bonding of structured substrates for electro-mechanical devices
MIRADIA INC4 citations63
US7449284B2Nov 11, 2008
Method and structure for fabricating mechanical mirror structures using backside alignment techniques
MIRADIA INC2 citations63
US7382519B2Jun 3, 2008
Method and device for fabricating a release structure to facilitate bonding of mirror devices onto a substrate
MIRADIA INC2 citations63
Showing the top 50 of 75 patents by PatentIndex Score.