Assignee

MITCHELL GLENN

US·2 granted patents·68 citations·filing 2010–2013

Technology mixC23C2 B01J1 B08B1 C01B1 H01J1 H01L1

Top patents by PatentIndex Score

2 records

0193US8623148B2NF3 chamber clean additiveMITCHELL GLENN·Filed 2010·Granted Jan 7, 2014·68 cites·12 claims
0244US8932406B2In-situ generation of the molecular etcher carbonyl fluoride or any of its variants and its useMITCHELL GLENN·Filed 2013·Granted Jan 13, 2015·0 cites·7 claims

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