Assignee
MITSUMORI TAKAHIRO
JP·2 granted patents·521 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0195US8967608B2Glass substrate-holding tool and method for producing an EUV mask blank by employing the sameMITSUMORI TAKAHIRO·Filed 2012·Granted Mar 3, 2015·521 cites·7 claims
- 0240US8837108B2Glass substrate-holding tool and method for producing an EUV mask blank by employing the sameMITSUMORI TAKAHIRO·Filed 2012·Granted Sep 16, 2014·0 cites·20 claims
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