Assignee
MIURA YUKIO
JP·3 granted patents·17 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0183US9330953B2Electrostatic chuck deviceMIURA YUKIO·Filed 2012·Granted May 3, 2016·7 cites·5 claims
- 0282US9269600B2Electrostatic chuck deviceMIURA YUKIO·Filed 2012·Granted Feb 23, 2016·6 cites·16 claims
- 0364US8421319B2Bearing holder mounting structure and motorMIURA YUKIO·Filed 2009·Granted Apr 16, 2013·4 cites·12 claims
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