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MIYA GO
JP
3 patents
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US8232522B2
Jul 31, 2012
Semiconductor inspecting apparatus
MIYA GO
8 citations
81
US8083889B2
Dec 27, 2011
Apparatus and method for plasma etching
MIYA GO
6 citations
72
US8519332B2
Aug 27, 2013
Semiconductor inspecting apparatus
MIYA GO
4 citations
60