Assignee
MIYAGI MASAHIRO
JP·4 granted patents·4 pending applications·12 citations·filing 2007–2012
Top patents by PatentIndex Score
8 records- 0185US8883030B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2012·Granted Nov 11, 2014·6 cites·11 claims
- 0273US9142433B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2012·Granted Sep 22, 2015·3 cites·14 claims
- 0371US8815048B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2007·Granted Aug 26, 2014·2 cites·4 claims
- 0462US9165798B2Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2012·Granted Oct 20, 2015·1 cites·14 claims
- 0545US2008178917A1Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2008·Application pending·0 cites
- 0645US2008173327A1Two-fluid nozzle, substrate processing apparatus, and substrate processing methodMIYAGI MASAHIRO·Filed 2007·Application pending·0 cites
- 0744US2007218656A1Substrate processing apparatus and substrate processing methodMIYAGI MASAHIRO·Filed 2007·Application pending·0 cites
- 0844US2007272545A1Apparatus for processing substrate and method of processing substrateMIYAGI MASAHIRO·Filed 2007·Application pending·0 cites
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