Assignee
MIYAKAWA TOMOKI
JP·2 granted patents·3 citations·filing 2008–2012
Top patents by PatentIndex Score
2 records- 0161US9746787B2Holding apparatus, exposure apparatus and manufacturing method of deviceMIYAKAWA TOMOKI·Filed 2012·Granted Aug 29, 2017·1 cites·33 claims
- 0260US8323855B2Pellicle frame apparatus, mask, exposing method, exposure apparatus, and device fabricating methodMIYAKAWA TOMOKI·Filed 2008·Granted Dec 4, 2012·2 cites·31 claims
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