Assignee
MIZUNO NORIKAZU
JP·4 granted patents·1 pending application·10 citations·filing 2008–2011
Top patents by PatentIndex Score
5 records- 0179US8557716B2Semiconductor device manufacturing method and substrate processing apparatusMIZUNO NORIKAZU·Filed 2010·Granted Oct 15, 2013·5 cites·5 claims
- 0273US8535479B2Manufacturing method of semiconductor device, and semiconductor deviceMIZUNO NORIKAZU·Filed 2011·Granted Sep 17, 2013·2 cites·10 claims
- 0373US8093159B2Manufacturing method of semiconductor device, and semiconductor deviceMIZUNO NORIKAZU·Filed 2008·Granted Jan 10, 2012·3 cites·30 claims
- 0454US2009205568A1Substrate processing method and substrate processing apparatusMIZUNO NORIKAZU·Filed 2009·Application pending·0 cites
- 0553US8847343B2Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatusMIZUNO NORIKAZU·Filed 2011·Granted Sep 30, 2014·0 cites·15 claims
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