Assignee
MIZUSAWA KENETSU
JP·4 granted patents·23 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0187US8236380B2Gas supply system, substrate processing apparatus and gas supply methodMIZUSAWA KENETSU·Filed 2009·Granted Aug 7, 2012·9 cites·8 claims
- 0282US8221638B2Gas supply system, substrate processing apparatus and gas supply methodMIZUSAWA KENETSU·Filed 2009·Granted Jul 17, 2012·4 cites·14 claims
- 0378US8701593B2Gas supply system, substrate processing apparatus and gas supply methodMIZUSAWA KENETSU·Filed 2012·Granted Apr 22, 2014·5 cites·12 claims
- 0477US8906193B2Gas supply unit, substrate processing apparatus and supply gas setting methodMIZUSAWA KENETSU·Filed 2009·Granted Dec 9, 2014·5 cites·4 claims
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