Assignee
MIZUTANI TAKEYUKI
JP·2 granted patents·2 pending applications·26 citations·filing 2004–2008
Top patents by PatentIndex Score
4 records- 0188US8675174B2Exposure apparatus, exposure method, and method for producing deviceMIZUTANI TAKEYUKI·Filed 2005·Granted Mar 18, 2014·15 cites·44 claims
- 0283US8089615B2Substrate holding apparatus, exposure apparatus, exposing method, and device fabricating methodMIZUTANI TAKEYUKI·Filed 2008·Granted Jan 3, 2012·11 cites·32 claims
- 0336US2008318152A1Substrate for Exposure, Exposure Method and Device Manufacturing MethodMIZUTANI TAKEYUKI·Filed 2005·Application pending·0 cites
- 0434US2007206167A1Exposure Method and Apparatus, and Device Manufacturing MethodMIZUTANI TAKEYUKI·Filed 2004·Application pending·0 cites
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