Assignee
MKS INC
CA7 patents
Top patents by PatentIndex Score
US7680932B2Mar 16, 2010
Version control system for software development
MKS INC93 citations90
US12500066B2Dec 16, 2025
Non-invasive IED estimation for pulsed-DC and low frequency applications
MKS INC0 citations61
US12586759B2Mar 24, 2026
Pulsed RF plasma generator with high dynamic range
MKS INC0 citations59
US12521745B2Jan 13, 2026
Method and apparatus for pulse gas delivery with pressure control
MKS INC0 citations51
US12592361B2Mar 31, 2026
Hybrid high-power and broadband variable impedance modules
MKS INC0 citations42
US12480869B2Nov 25, 2025
Multi-wavelength ozone concentration sensor and method of use
MKS INC0 citations38
US12397362B2Aug 26, 2025
GaN clamp with uniform pressure
MKS INC0 citations30