Assignee
MKS INSTR
US6 patents
Top patents by PatentIndex Score
US7316163B2Jan 8, 2008
Method of forming a seal between a housing and a diaphragm of a capacitance sensor
MKS INSTR18 citations90
US6439056B1Aug 27, 2002
Sensor element having temperature measuring means
MKS INSTR41 citations90
US7389697B2Jun 24, 2008
Pressure sensor for detecting small pressure differences and low pressures
MKS INSTR16 citations85
US7385798B2Jun 10, 2008
Multiple sensor feedback for controlling multiple ionizers
MKS INSTR10 citations80
US11262340B2Mar 1, 2022
Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use
MKS INSTR0 citations61
US9796603B2Oct 24, 2017
Pressure-less ozonated di-water (DIO3) recirculation reclaim system
MKS INSTR0 citations44