Assignee
MKS JAPAN INC
JP·20 granted patents·581 citations·filing 1992–2007
Top patents by PatentIndex Score
20 records- 0196US5727769ASolenoid valve for flow rate controlMKS JAPAN INC·Filed 1996·Granted Mar 17, 1998·92 cites·8 claims
- 0293US6178996B1Flow rate control apparatusMKS JAPAN INC·Filed 1999·Granted Jan 30, 2001·86 cites·9 claims
- 0389US7219551B2Differential pressure sensorMKS JAPAN INC·Filed 2005·Granted May 22, 2007·19 cites·14 claims
- 0486US5672821ALaminar flow deviceMKS JAPAN INC·Filed 1995·Granted Sep 30, 1997·58 cites·5 claims
- 0585US5410912AMass flow sensorMKS JAPAN INC·Filed 1994·Granted May 2, 1995·51 cites·8 claims
- 0679US6581625B1Liquid supply system, method for cleaning the same and vaporizerMKS JAPAN INC·Filed 2000·Granted Jun 24, 2003·22 cites·2 claims
- 0777US5582208AFlow control valveMKS JAPAN INC·Filed 1995·Granted Dec 10, 1996·32 cites·5 claims
- 0877US5295394ABypass unit for a flowmeter sensorMKS JAPAN INC·Filed 1992·Granted Mar 22, 1994·31 cites·3 claims
- 0976US6494957B1Vaporizing apparatusMKS JAPAN INC·Filed 2000·Granted Dec 17, 2002·14 cites·17 claims
- 1072US6916004B2Electromagnetic valveMKS JAPAN INC·Filed 2003·Granted Jul 12, 2005·15 cites·8 claims
- 1169US5741968AFlow detecting assemblyMKS JAPAN INC·Filed 1996·Granted Apr 21, 1998·36 cites·4 claims
- 1268US6318171B1Flow rate sensor implementing a plurality of inner tubes located within a sensor tubeMKS JAPAN INC·Filed 1999·Granted Nov 20, 2001·30 cites·8 claims
- 1367US5398549AFlowmeter sensorMKS JAPAN INC·Filed 1992·Granted Mar 21, 1995·25 cites·6 claims
- 1465US7469583B2Flow sensorMKS JAPAN INC·Filed 2007·Granted Dec 30, 2008·5 cites·5 claims
- 1561US7051991B2Control valveMKS JAPAN INC·Filed 2004·Granted May 30, 2006·9 cites·9 claims
- 1661US6715507B2VaporizerMKS JAPAN INC·Filed 2003·Granted Apr 6, 2004·8 cites·2 claims
- 1757US5927331AFlow control valveMKS JAPAN INC·Filed 1996·Granted Jul 27, 1999·15 cites·10 claims
- 1855US6755210B2Mass flow controllerMKS JAPAN INC·Filed 2001·Granted Jun 29, 2004·5 cites·12 claims
- 1950US5594666AMass flow control systemMKS JAPAN INC·Filed 1994·Granted Jan 14, 1997·20 cites·7 claims
- 2041US6152421AValve body and electromagnetic control valve using the sameMKS JAPAN INC·Filed 1998·Granted Nov 28, 2000·8 cites·6 claims
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