Assignee
MODDERMAN THEODORUS MARINUS
NL·3 granted patents·66 citations·filing 2008–2011
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0197US8233137B2Lithographic apparatus and device manufacturing methodMODDERMAN THEODORUS MARINUS·Filed 2008·Granted Jul 31, 2012·54 cites·38 claims
- 0293US9116443B2Lithographic apparatus and device manufacturing methodMODDERMAN THEODORUS MARINUS·Filed 2011·Granted Aug 25, 2015·6 cites·15 claims
- 0393US8462312B2Lithographic apparatus and device manufacturing methodMODDERMAN THEODORUS MARINUS·Filed 2011·Granted Jun 11, 2013·6 cites·16 claims
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