Assignee
MORISAWA TOSHIHIRO
JP·4 granted patents·26 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0189US9110461B2Semiconductor manufacturing equipmentMORISAWA TOSHIHIRO·Filed 2012·Granted Aug 18, 2015·13 cites·14 claims
- 0279US8924001B2Etching apparatus, control simulator, and semiconductor device manufacturing methodMORISAWA TOSHIHIRO·Filed 2010·Granted Dec 30, 2014·5 cites·21 claims
- 0374US8486290B2Etching apparatus, analysis apparatus, etching treatment method, and etching treatment programMORISAWA TOSHIHIRO·Filed 2009·Granted Jul 16, 2013·5 cites·13 claims
- 0468US8282849B2Etching process state judgment method and system thereforMORISAWA TOSHIHIRO·Filed 2009·Granted Oct 9, 2012·3 cites·9 claims
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