Assignee
MORITA SHINYA
JP7 patents
Top patents by PatentIndex Score
US8264291B2Sep 11, 2012
Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
MORITA SHINYA269 citations99
US8529701B2Sep 10, 2013
Substrate processing apparatus
MORITA SHINYA464 citations96
US9184298B2Nov 10, 2015
Interconnect structure and sputtering target
MORITA SHINYA13 citations83
US8851886B2Oct 7, 2014
Substrate processing apparatus and method of manufacturing semiconductor device
MORITA SHINYA11 citations83
US8076615B2Dec 13, 2011
Substrate processing apparatus and method of manufacturing semiconductor device
MORITA SHINYA13 citations81
US10468535B2Nov 5, 2019
Oxide for semiconductor layer of thin film transistor, sputtering target, and thin film transistor
MORITA SHINYA4 citations71
US9299474B2Mar 29, 2016
Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistor
MORITA SHINYA2 citations61