Assignee
MORIYA MASATO
JP17 patents
Top patents by PatentIndex Score
US8242472B2Aug 14, 2012
Extreme ultraviolet light source device and control method for extreme ultraviolet light source device
MORIYA MASATO37 citations93
US8395133B2Mar 12, 2013
Apparatus and method of adjusting a laser light source for an EUV source device
MORIYA MASATO21 citations92
US8536551B2Sep 17, 2013
Extreme ultra violet light source apparatus
MORIYA MASATO10 citations84
US8502178B2Aug 6, 2013
Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon
MORIYA MASATO12 citations84
US8399870B2Mar 19, 2013
Extreme ultraviolet light source device and control method for extreme ultraviolet light source device
MORIYA MASATO8 citations84
US8256441B2Sep 4, 2012
Method for cleaning optical element of EUV light source device and optical element cleaning device
MORIYA MASATO15 citations84
US8198613B2Jun 12, 2012
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
MORIYA MASATO12 citations84
US8173984B2May 8, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO8 citations84
US8847181B2Sep 30, 2014
System and method for generating extreme ultraviolet light
MORIYA MASATO6 citations73
US9325150B2Apr 26, 2016
Alignment system and extreme ultraviolet light generation system
MORIYA MASATO2 citations63
US8592787B2Nov 26, 2013
Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device
MORIYA MASATO3 citations62
US8481983B2Jul 9, 2013
Extreme ultra violet light source apparatus
MORIYA MASATO2 citations62
US8294129B2Oct 23, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO3 citations62
US8227778B2Jul 24, 2012
Semiconductor exposure device using extreme ultra violet radiation
MORIYA MASATO3 citations62
US8698113B2Apr 15, 2014
Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus
MORIYA MASATO1 citations52
US8507885B2Aug 13, 2013
Semiconductor exposure device using extreme ultra violet radiation
MORIYA MASATO0 citations52
US9128391B2Sep 8, 2015
Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
MORIYA MASATO0 citations42