Assignee
MOS EVERHARDUS CORNELIS
NL·7 granted patents·103 citations·filing 2007–2011
Top patents by PatentIndex Score
7 records- 0197US8706442B2Alignment system, lithographic system and methodMOS EVERHARDUS CORNELIS·Filed 2009·Granted Apr 22, 2014·89 cites·20 claims
- 0281US8612045B2Optimization method and a lithographic cellMOS EVERHARDUS CORNELIS·Filed 2009·Granted Dec 17, 2013·7 cites·12 claims
- 0376US8248579B2Lithographic apparatus, device manufacturing method and device for correcting overlay errors between overlapping patternsMOS EVERHARDUS CORNELIS·Filed 2007·Granted Aug 21, 2012·4 cites·21 claims
- 0472US8237914B2Process, apparatus, and device for determining intra-field correction to correct overlay errors between overlapping patternsMOS EVERHARDUS CORNELIS·Filed 2007·Granted Aug 7, 2012·3 cites·21 claims
- 0550US9632430B2Lithographic system, lithographic method and device manufacturing methodMOS EVERHARDUS CORNELIS·Filed 2009·Granted Apr 25, 2017·0 cites·23 claims
- 0639US8972031B2Control method and apparatusMOS EVERHARDUS CORNELIS·Filed 2011·Granted Mar 3, 2015·0 cites·14 claims
- 0738US8504333B2Method for selecting sample positions on a substrate, method for providing a representation of a model of properties of a substrate, method of providing a representation of the variation of properties of a substrate across the substrate and device manufacturing methodMOS EVERHARDUS CORNELIS·Filed 2010·Granted Aug 6, 2013·0 cites·13 claims
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