Assignee

MOSEL VILTELIC INC

TW·1 granted patent·144 citations·filing 1996–1996

Technology mixG01Q1 G03F1 H10P1 H10W1

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0191US5701013AWafer metrology pattern integrating both overlay and critical dimension features for SEM or AFM measurementsMOSEL VILTELIC INC·Filed 1996·Granted Dec 23, 1997·144 cites·18 claims

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