Assignee
MRS TECHNOLOGY INC
US·7 granted patents·467 citations·filing 1987–1997
Top patents by PatentIndex Score
7 records- 0193US4769680AApparatus and method for making large area electronic devices, such as flat panel displays and the like, using correlated, aligned dual optical systemsMRS TECHNOLOGY INC·Filed 1987·Granted Sep 6, 1988·151 cites·60 claims
- 0291US5677758ALithography System using dual substrate stagesMRS TECHNOLOGY INC·Filed 1995·Granted Oct 14, 1997·136 cites·15 claims
- 0383US5991004ALens focus shift sensorMRS TECHNOLOGY INC·Filed 1996·Granted Nov 23, 1999·54 cites·43 claims
- 0479US5828142APlaten for use with lithographic stages and method of making sameMRS TECHNOLOGY INC·Filed 1997·Granted Oct 27, 1998·51 cites·25 claims
- 0577US5739913ANon-contact edge detectorMRS TECHNOLOGY INC·Filed 1996·Granted Apr 14, 1998·39 cites·20 claims
- 0669US4855792AOptical alignment system for use in photolithography and having reduced reflectance errorsMRS TECHNOLOGY INC·Filed 1988·Granted Aug 8, 1989·20 cites·19 claims
- 0759US5483345AAlignment system for use in lithography utilizing a spherical reflector having a centered etched-on projection objectMRS TECHNOLOGY INC·Filed 1994·Granted Jan 9, 1996·16 cites·16 claims
Join the waitlist — get patent alerts
Get an alert when MRS TECHNOLOGY INC files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →