Assignee

MUELLENDER STEPHAN

DE·1 granted patent·0 citations·filing 2012–2012

Technology mixB82Y1 G02B1 G03F1

Top patents by PatentIndex Score

1 record

0137US9494718B2Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objectiveMUELLENDER STEPHAN·Filed 2012·Granted Nov 15, 2016·0 cites·27 claims

Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →