Assignee
MULDER HEINE MELLE
NL·6 granted patents·12 citations·filing 2007–2012
Top patents by PatentIndex Score
6 records- 0185US9116439B2Illumination system and lithographic apparatusMULDER HEINE MELLE·Filed 2011·Granted Aug 25, 2015·4 cites·20 claims
- 0274US8896815B2Lithographic apparatus and device manufacturing methodMULDER HEINE MELLE·Filed 2012·Granted Nov 25, 2014·2 cites·20 claims
- 0372US8937706B2Lithographic apparatus and methodMULDER HEINE MELLE·Filed 2007·Granted Jan 20, 2015·3 cites·24 claims
- 0464US8587766B2Lithographic apparatus and device manufacturing methodMULDER HEINE MELLE·Filed 2009·Granted Nov 19, 2013·1 cites·21 claims
- 0562US8194231B2Lithographic apparatus and methodMULDER HEINE MELLE·Filed 2008·Granted Jun 5, 2012·2 cites·24 claims
- 0653US9250536B2Lithographic apparatus and methodMULDER HEINE MELLE·Filed 2008·Granted Feb 2, 2016·0 cites·23 claims
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