Assignee
MULTIBEAM CORP
US·31 granted patents·5 pending applications·341 citations·filing 2006–2024
Top patents by PatentIndex Score
36 records- 0197US10026589B1Alignment and registration targets for charged particle beam substrate patterning and inspectionMULTIBEAM CORP·Filed 2017·Granted Jul 17, 2018·21 cites·37 claims
- 0297US10020200B1Patterned atomic layer etching and deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Jul 10, 2018·12 cites·15 claims
- 0397US9556521B1Precision deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Jan 31, 2017·14 cites·29 claims
- 0497US9478395B1Alignment and registration targets for multiple-column charged particle beam lithography and inspectionMULTIBEAM CORP·Filed 2014·Granted Oct 25, 2016·28 cites·40 claims
- 0597US9466464B1Precision substrate material removal using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Oct 11, 2016·12 cites·31 claims
- 0697US9453281B1Precision deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Sep 27, 2016·16 cites·33 claims
- 0796US10312091B1Secure permanent integrated circuit personalizationMULTIBEAM CORP·Filed 2016·Granted Jun 4, 2019·12 cites·17 claims
- 0896US9881817B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2016·Granted Jan 30, 2018·11 cites·29 claims
- 0996US9673114B1Precision substrate material removal using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Jun 6, 2017·11 cites·28 claims
- 1096US9595419B1Alignment and registration targets for multiple-column charged particle beam lithography and inspectionMULTIBEAM CORP·Filed 2014·Granted Mar 14, 2017·18 cites·45 claims
- 1196US9207539B1Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systemsMULTIBEAM CORP·Filed 2015·Granted Dec 8, 2015·13 cites·21 claims
- 1295US9824859B1Precision material modification using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2015·Granted Nov 21, 2017·8 cites·20 claims
- 1395US9184027B1Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield rampMULTIBEAM CORP·Filed 2015·Granted Nov 10, 2015·10 cites·14 claims
- 1495US8999627B1Matched multiple charged particle beam systems for lithographic patterning, inspection, and accelerated yield rampMULTIBEAM CORP·Filed 2014·Granted Apr 7, 2015·15 cites·24 claims
- 1594US10523433B1Secure intra-chip hardware micro-segmentation using charged particle beam processingMULTIBEAM CORP·Filed 2017·Granted Dec 31, 2019·12 cites·28 claims
- 1694US10020166B1Alignment and registration targets for charged particle beam substrate patterning and inspectionMULTIBEAM CORP·Filed 2017·Granted Jul 10, 2018·8 cites·16 claims
- 1793US10341108B1Secure permanent integrated circuit personalizationMULTIBEAM CORP·Filed 2016·Granted Jul 2, 2019·6 cites·19 claims
- 1893US9620332B1Charged particle beam substrate inspection using both vector and raster scanningMULTIBEAM CORP·Filed 2015·Granted Apr 11, 2017·14 cites·8 claims
- 1993US8999628B1Automatic optimization of etch process for accelerated yield ramp with matched charged particle multi-beam systemsMULTIBEAM CORP·Filed 2014·Granted Apr 7, 2015·10 cites·24 claims
- 2093US7928404B2Variable-ratio double-deflection beam blankerMULTIBEAM CORP·Filed 2008·Granted Apr 19, 2011·18 cites·14 claims
- 2192US8384048B2Charged particle beam deflection method with separate stage tracking and stage positional error signalsMULTIBEAM CORP·Filed 2008·Granted Feb 26, 2013·50 cites·20 claims
- 2291US9822443B1Precision material modification using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2016·Granted Nov 21, 2017·4 cites·18 claims
- 2389US7941237B2Flat panel display substrate testing systemMULTIBEAM CORP·Filed 2006·Granted May 10, 2011·13 cites·27 claims
- 2487US10607845B1Patterned atomic layer etching and deposition using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2018·Granted Mar 31, 2020·2 cites·25 claims
- 2585US10978303B1Secure permanent integrated circuit personalizationMULTIBEAM CORP·Filed 2019·Granted Apr 13, 2021·2 cites·5 claims
- 2675US10659229B1Secure permanent integrated circuit personalizationMULTIBEAM CORP·Filed 2019·Granted May 19, 2020·1 cites·3 claims
- 2771US11037756B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2020·Granted Jun 15, 2021·0 cites·30 claims
- 2867US10658153B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2019·Granted May 19, 2020·0 cites·21 claims
- 2962US10734192B1Precision substrate material multi-processing using miniature-column charged particle beam arraysMULTIBEAM CORP·Filed 2017·Granted Aug 4, 2020·0 cites·19 claims
- 3062US2025266238A1Modular miniature charged particle beam columnMULTIBEAM CORP·Filed 2024·Application pending·0 cites
- 3161US2025299910A1Charged particle processing systemMULTIBEAM CORP·Filed 2024·Application pending·0 cites
- 3260US2025385073A1Positioning in a charged particle processing systemMULTIBEAM CORP·Filed 2024·Application pending·0 cites
- 3359US2025336643A1Electron beam processing methodsMULTIBEAM CORP·Filed 2024·Application pending·0 cites
- 3458US11063756B1Secure intra-chip hardware micro-segmentation using charged particle beam processingMULTIBEAM CORP·Filed 2019·Granted Jul 13, 2021·0 cites·19 claims
- 3552US2013266894A1Charged particle beam deflection method with separate stage tracking and stage positional error signalsMULTIBEAM CORP·Filed 2013·Application pending·0 cites
- 3643US12451325B2Charged particle beam axial calibrationMULTIBEAM CORP·Filed 2022·Granted Oct 21, 2025·0 cites·21 claims
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