Assignee

MURAKAMI SHOICHI

JP·2 granted patents·4 citations·filing 2012–2012

Technology mixH01L2 H10P2 C23C1 H10D1 H10W1

Top patents by PatentIndex Score

2 records

0168US9123542B2Plasma etching methodMURAKAMI SHOICHI·Filed 2012·Granted Sep 1, 2015·4 cites·9 claims
0237US9117660B2Apparatus, method and program for manufacturing nitride filmMURAKAMI SHOICHI·Filed 2012·Granted Aug 25, 2015·0 cites·11 claims

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