Assignee
MURAKAWA TSUTOMU
JP·3 granted patents·8 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0180US8604431B2Pattern-height measuring apparatus and pattern-height measuring methodMURAKAWA TSUTOMU·Filed 2012·Granted Dec 10, 2013·6 cites·12 claims
- 0261US8071943B2Mask inspection apparatus and image creation methodMURAKAWA TSUTOMU·Filed 2009·Granted Dec 6, 2011·1 cites·10 claims
- 0360US8559697B2Mask inspection apparatus and image generation methodMURAKAWA TSUTOMU·Filed 2011·Granted Oct 15, 2013·1 cites·12 claims
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