Assignee
MURAMATSU KOUJI
US·4 granted patents·1 pending application·25 citations·filing 2008–2012
Top patents by PatentIndex Score
5 records- 0188US8144308B2Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing methodMURAMATSU KOUJI·Filed 2008·Granted Mar 27, 2012·18 cites·20 claims
- 0276US8953147B2Spatial light modulation unit, illumination optical apparatus, exposure apparatus, and device manufacturing methodMURAMATSU KOUJI·Filed 2012·Granted Feb 10, 2015·3 cites·11 claims
- 0362US8908151B2Illumination optical system, exposure apparatus, device manufacturing method, compensation filter, and exposure optical systemMURAMATSU KOUJI·Filed 2009·Granted Dec 9, 2014·4 cites·39 claims
- 0445US8223318B2Illuminating optical apparatus, exposure apparatus and device manufacturing methodMURAMATSU KOUJI·Filed 2008·Granted Jul 17, 2012·0 cites·27 claims
- 0544US2011181858A1Variable slit device, illumination device, exposure apparatus, exposure method, and device manufacturing methodMURAMATSU KOUJI·Filed 2011·Application pending·0 cites
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