Assignee
NA HEUNG-YEOL
KR·3 granted patents·1 pending application·6 citations·filing 2010–2010
Top patents by PatentIndex Score
4 records- 0180US8512530B2Sputtering apparatusNA HEUNG-YEOL·Filed 2010·Granted Aug 20, 2013·2 cites·22 claims
- 0276US8771420B2Substrate processing apparatusNA HEUNG-YEOL·Filed 2010·Granted Jul 8, 2014·4 cites·18 claims
- 0347US8486195B2Atomic layer deposition apparatus and method of fabricating atomic layer using the sameNA HEUNG-YEOL·Filed 2010·Granted Jul 16, 2013·0 cites·13 claims
- 0445US2011151599A1Vapor deposition apparatus having improved carrier gas supplying structure and method of manufacturing an organic light emitting display apparatus by using the vapor deposition apparatusNA HEUNG-YEOL·Filed 2010·Application pending·0 cites
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