Assignee
NAGAHASHI YOSHITOMO
JP·2 granted patents·0 citations·filing 2011–2011
Technology mixG03F2
Top patents by PatentIndex Score
2 records- 0155US8896813B2Exposure apparatus, exposure method, method for manufacturing deviceNAGAHASHI YOSHITOMO·Filed 2011·Granted Nov 25, 2014·0 cites·35 claims
- 0251US8797502B2Exposure apparatus, exposure method, and method for producing device with electricity removal device by adding additive to liquidNAGAHASHI YOSHITOMO·Filed 2011·Granted Aug 5, 2014·0 cites·28 claims
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