Assignee
NAGAMORI MASASHI
JP3 patents
Top patents by PatentIndex Score
US8580486B2Nov 12, 2013
Salt having fluorine-containing carbanion structure, derivative thereof, photoacid generator, resist material using the photoacid generator, and pattern forming method
NAGAMORI MASASHI3 citations60
US8889888B2Nov 18, 2014
Sulfonic acid salt and derivative thereof, photo-acid generator, and process for production of sulfonic acid salt
NAGAMORI MASASHI0 citations39
US8877960B2Nov 4, 2014
Fluoroalkanesulfonic acid ammonium salts and method for producing same
NAGAMORI MASASHI0 citations36