Assignee
NAGAYAMA NOBUYUKI
JP·4 granted patents·6 citations·filing 2002–2012
Top patents by PatentIndex Score
4 records- 0177US8221579B2Method of reusing a consumable part for use in a plasma processing apparatusNAGAYAMA NOBUYUKI·Filed 2010·Granted Jul 17, 2012·3 cites·8 claims
- 0273US8475622B2Method of reusing a consumable part for use in a plasma processing apparatusNAGAYAMA NOBUYUKI·Filed 2012·Granted Jul 2, 2013·2 cites·6 claims
- 0345US8739732B2Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal memberNAGAYAMA NOBUYUKI·Filed 2002·Granted Jun 3, 2014·1 cites·26 claims
- 0438US8545672B2Plasma processing apparatusNAGAYAMA NOBUYUKI·Filed 2011·Granted Oct 1, 2013·0 cites·4 claims
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