Assignee
NAKAJIMA YUMI
JP·2 granted patents·1 pending application·4 citations·filing 2009–2010
Top patents by PatentIndex Score
3 records- 0174US8187773B2Method for generating mask pattern data and method for manufacturing maskNAKAJIMA YUMI·Filed 2009·Granted May 29, 2012·4 cites·20 claims
- 0241US8728711B2Cleaning reticle, method for cleaning reticle stage, and method for manufacturing semiconductor deviceNAKAJIMA YUMI·Filed 2010·Granted May 20, 2014·0 cites·8 claims
- 0334US2011151357A1Exposure dose monitoring method and method of manufacturing exposure dose monitoring maskNAKAJIMA YUMI·Filed 2010·Application pending·0 cites
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →