Assignee
NAKAMORI MITSUNORI
JP·2 granted patents·1 pending application·0 citations·filing 2010–2011
Top patents by PatentIndex Score
3 records- 0142US9095953B2Apparatus for polishing rear surface of substrate, system for polishing rear surface of substrate, method for polishing rear surface of substrate and recording medium having program for polishing rear surface of substrateNAKAMORI MITSUNORI·Filed 2011·Granted Aug 4, 2015·0 cites·9 claims
- 0236US8617656B2Liquid processing apparatus, liquid processing method, and storage mediumNAKAMORI MITSUNORI·Filed 2010·Granted Dec 31, 2013·0 cites·5 claims
- 0331US2012164339A1Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method and Computer Readable Recording Medium Having Substrate Liquid Processing ProgramNAKAMORI MITSUNORI·Filed 2011·Application pending·0 cites
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