Assignee
NAKAO HIDETAKA
JP·3 granted patents·11 citations·filing 2008–2010
Top patents by PatentIndex Score
3 records- 0187US8388409B2Substrate polishing apparatusNAKAO HIDETAKA·Filed 2010·Granted Mar 5, 2013·9 cites·8 claims
- 0260US8206197B2Polishing apparatus and program thereofNAKAO HIDETAKA·Filed 2008·Granted Jun 26, 2012·1 cites·33 claims
- 0353US8078306B2Polishing apparatus and polishing methodNAKAO HIDETAKA·Filed 2008·Granted Dec 13, 2011·1 cites·9 claims
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