Assignee
NAKASHIMA NOBUAKI
JP·2 granted patents·5 citations·filing 2012–2012
Top patents by PatentIndex Score
2 records- 0180US8747633B2Tantalum sputtering target and method for manufacturing the same, and method for manufacturing semiconductor elementNAKASHIMA NOBUAKI·Filed 2012·Granted Jun 10, 2014·5 cites·5 claims
- 0263US9382613B2Sputtering target, manufacturing method thereof, and manufacturing method of semiconductor elementNAKASHIMA NOBUAKI·Filed 2012·Granted Jul 5, 2016·0 cites·4 claims
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