Assignee
NAKASHIMA SEIYO
JP·3 granted patents·12 citations·filing 2009–2011
Top patents by PatentIndex Score
3 records- 0188US8420167B2Method of manufacturing a semiconductor deviceNAKASHIMA SEIYO·Filed 2009·Granted Apr 16, 2013·9 cites·15 claims
- 0269US8303712B2Substrate processing apparatus, method for manufacturing semiconductor device, and process tubeNAKASHIMA SEIYO·Filed 2009·Granted Nov 6, 2012·3 cites·15 claims
- 0338US9698037B2Substrate processing apparatusNAKASHIMA SEIYO·Filed 2011·Granted Jul 4, 2017·0 cites·17 claims
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