Assignee
NAKAYAMADA NORIAKI
JP·4 granted patents·1 pending application·46 citations·filing 2009–2012
Top patents by PatentIndex Score
5 records- 0192US8178856B2Charged particle beam writing apparatus and method thereofNAKAYAMADA NORIAKI·Filed 2010·Granted May 15, 2012·22 cites·10 claims
- 0291US8563953B2Charged particle beam writing apparatus and charged particle beam writing methodNAKAYAMADA NORIAKI·Filed 2011·Granted Oct 22, 2013·10 cites·10 claims
- 0385US8129698B2Charged-particle beam writing method and charged-particle beam writing apparatusNAKAYAMADA NORIAKI·Filed 2009·Granted Mar 6, 2012·9 cites·20 claims
- 0481US8502175B2Charged particle beam pattern forming apparatus and charged particle beam pattern forming methodNAKAYAMADA NORIAKI·Filed 2011·Granted Aug 6, 2013·5 cites·10 claims
- 0553US2013032707A1Charged particle beam drawing apparatus and electrical charging effect correction method thereofNAKAYAMADA NORIAKI·Filed 2012·Application pending·0 cites
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