Assignee

NANO ELECTRONICS AND MICRO SYS

TW·1 granted patent·1 pending application·2 citations·filing 2002–2002

Technology mixB08B1 H01J1

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2 records

0143US6603091B2Cleaning device with deeply reaching plasma and assisting electrodesNANO ELECTRONICS AND MICRO SYS·Filed 2002·Granted Aug 5, 2003·2 cites·24 claims
0225US2003184234A1Electrode device for a plasma processing systemNANO ELECTRONICS AND MICRO SYS·Filed 2002·Application pending·0 cites

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