Assignee
NANO UV
FR·2 granted patents·1 pending application·1 citations·filing 2004–2008
Top patents by PatentIndex Score
3 records- 0144US7508914B2Radiology deviceNANO UV·Filed 2006·Granted Mar 24, 2009·0 cites·23 claims
- 0240US7964857B2Plasma source of directed beams and application thereof to microlithographyNANO UV·Filed 2004·Granted Jun 21, 2011·1 cites·41 claims
- 0339US2010183984A1Multiplexing of pulsed sourcesNANO UV·Filed 2008·Application pending·0 cites
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